Fabrication of electrical semi-conductive SiCN ceramics by vat photopolymerization

doi:10.1016/j.jmst.2023.05.012

材料科学与技术 ›› 2023, Vol. 165 ›› Issue (0): 123-131.DOI: 10.1016/j.jmst.2023.05.012

收稿日期:2023-04-11 修回日期:2023-05-07 接受日期:2023-05-08 出版日期:2023-12-01 发布日期:2023-06-10

Fabrication of electrical semi-conductive SiCN ceramics by vat photopolymerization

Siyao Chen^a,b, Xue Wan^a, Jinping Li^a, Bo Gao^a, Xuliang Chen^b, Songhe Meng^a,*, Jian Lu^b,*

^aNational key laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China;
^bDepartment of Mechanical Engineering, City University of Hong Kong, Hong Kong, SAR, China

Received:2023-04-11 Revised:2023-05-07 Accepted:2023-05-08 Online:2023-12-01 Published:2023-06-10
Contact: *E-mail addresses: . mengsh@hit.edu.cn (S. Meng), jianlu@cityu.edu.hk (J. Lu)

摘要/Abstract

Abstract: The emergence of additive manufacturing (AM) enables ceramics to be fabricated with customized geometry, and polymer-derived ceramics (PDCs) has attracted growing attention owing to their irreplaceable advantages. The combination of 3D printing and PDCs endows the resultant ceramics with both precision and performance. However, AM of ceramics from preceramic polymers is still challenging, and insufficient investigation of functionality also limits the versatility of precursor and its derived ceramics. Herein, we propose a novel paradigm for 3D printing dense silicon carbonitride ceramic and study its electrical semi-conducting properties. The formulated photosensitive precursor inks could achieve self-polymerization and cross-linking under the radiation of UV light (405 nm). The green body with intricate structures is fabricated by digital light processing (DLP). Lightweight (1.79-2.08 g cm^-3) and low porosity (< 5%) amorphous ceramics were obtained after thermal treatments. Processes of cross-linking, decomposition, and ceramization are monitored and analyzed. Furthermore, the semi-conducting behaviors of resultant ceramics are identified where the conductivity (10^-5-10^-1 S m^-1) has a monotonic correspondence with the testing temperatures (25-1000 °C). The numerical relationship is fitted by exponential functions, and its conducting mechanism could be interpreted by the band tail hopping (BTH) model. This work could provide alternative solutions for the fabrication of PDCs and potentials for sensing applications.

Key words: Additive manufacturing, Polymer-derived ceramics, Digital light processing, Silicon carbonitride, Semi-conducting behavior

. [J]. 材料科学与技术, 2023, 165(0): 123-131.

Siyao Chen, Xue Wan, Jinping Li, Bo Gao, Xuliang Chen, Songhe Meng, Jian Lu. Fabrication of electrical semi-conductive SiCN ceramics by vat photopolymerization[J]. J. Mater. Sci. Technol., 2023, 165(0): 123-131.

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Fabrication of electrical semi-conductive SiCN ceramics by vat photopolymerization

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