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J. Mater. Sci. Technol. 2004, 20(02) 145-148  DOI:      ISSN: 1005-0302 CN: 21-1315/TG

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Keywords
Porous Si
Passivation
Diamond film
Dia
Authors
Linjun WANG
Yiben XIA
Weili ZHANG
Minglong ZHANG
Weimin SHI
PubMed
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Luminescent Properties of Porous Si Passivated by Diamond Film and DLC Film

Linjun WANG,Yiben XIA,Weili ZHANG,Minglong ZHANG,Weimin SHI

Abstract

Surface passivation methods for porous Si (PS) surfaces, i.e., depositing diamond film or diamond-like carbon (DLC) film on PS surfaces, were attempted. Two emission bands, weak blue band and strong red band existed in the PL spectrum of diamond film coated on PS, were discovered by the photoluminescence measurements. The luminescent mechanism and stability were discussed. The results indicated that diamond film may stabilize the PL wavelength and intensity of PS, and therefore could become a promising passivation film of porous Si. The PL properties of PS coated by DLC films, including hydrogenated diamond like carbon (DLC:H) film and nitrogen doped DLC film (DLC:N) were also studied in this paper. The DLC films may stabilize the PL of PS, but the photoluminescent intensity was obviously weaker than that of diamond film coated PS.

Keywords Porous Si   Passivation   Diamond film   Dia   
Received 2003-06-20 Revised 1900-01-01 Online: 2009-10-10 
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