Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform

doi:10.1016/j.jmst.2019.09.002

Abstract

Abstract:

Approaches for the fabrication of a low power-operable formaldehyde (HCHO) gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide (In₂O₃) nanofibers decorated with well-dispersed Au nanoparticles as a sensing material. Homogeneous In₂O₃ nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process. Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In₂O₃ nanofibers. The Au-decorated In₂O₃ nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes. The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system (MEMS) technique. The micro-platform gas sensor consisting with Au-In₂O₃ nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity. The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration, the size of the adsorbed Au nanoparticles, the applied power to raise the temperature of a sensing part and the kind of target gases.

Key words: Gold nanoparticle, In₂O₃ nanofiber, Formaldehyde, Gas sensor, Low power, Micro-platform

Dongha Im, Donghyun Kim, Dasol Jeong, Woon Ik Park, Myoungpyo Chun, Joon-Shik Park, Hyunjung Kim, Hyunsung Jung. Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In₂O₃ nanofibers integrated on low power MEMS platform[J]. J. Mater. Sci. Technol., 2020, 38: 56-63.

Figures/Tables 9

Fig. 1. Characterization of bare In2O3 nanofibers: (a) SEM image of low magnification;(b) SEM image of high magnification; (c) cross-sectional image of nanofibers; (d) X-ray diffraction pattern of In2O3 nanofibers.

Fig. 2. TEM analysis of Au catalyst-decorated In2O3 nanofibers prepared by adding lysine with controlled amount of 3 mL (a, b, c) and 15 mL (d, e, f): (a, c) bright field TEM images (inset: HRTEM images and diameter profiles of the decorated Au catalysts); (b, e) high-angle annular dark field STEM images; (c, f) EDS mapping for O, In, and Au elements.

Fig. 3. Schematic illustration for the decoration of Au nanoparticles on the surface of In2O3 nanofibers.

Fig. 4. (a) Illustration of a MEMS micro-platform (inset: the images of a micro-platform), (b) the local temperature of a sensing part on the micro-platform depending on the applied power to micro-heater, (c) images for the reliable integration of sensing material-based ink on micro-platform depending on the droplet cycles and (d) the thickness and resistance of the integrated sensing materials as a function of droplet cycles.

Fig. 5. (a) Sensing behavior of bare In2O3 nanofibers as a function of HCHO gas concentration for different heating powers and (b) sensitivity for gas concentrations of HCHO and heating powers.

Fig. 6. (a) Sensing behavior of In2O3 nanofibers-based sensing materials as a function of HCHO gas concentration in the micro-platform heated with 15 mW for different heating powers, (b) sensitivity of In2O3 nanofibers-based sensing materials heated with 15 mW at different concentrations of HCHO gases, (c) sensing behavior of Au-In2O3 nanofibers (15 mL lysine) as a function of HCHO gas concentration for different heating powers and (d) sensitivity of Au-In2O3 nanofibers (15 mL lysine) for gas concentrations of HCHO and heating powers.

Table 1 Gas sensing properties of the recently reported MEMS gas sensor.

Target gas	Sensitive material	Sensitivity	Detection limit (ppm)	Working Temp. (°C)	Power (mW)	Ref.
Formaldehyde	Au-In₂O₃ nanofibers	1.06	1	133	5	This work (15 mL lysine)
		1.4		205	10
		3.87		277	15
Formaldehyde	Pt-doped SnO₂ thin film	1.19	0.1	300	10.5	[39]
Formaldehyde	Pt-doped SnO₂ thin film	N/A	1	N/A	31.5	[40]
Formaldehyde	SnO₂ thin film	1.26	1	210	17.6	[41]
Toluene	Pt-doped SnO₂ thin film	N/A	25	440	45	[40]
Carbon monoxide	SnO₂ thin film	1.13	25	210		[41]
Ammonia	SnO₂ nano film	N/A	0.4	300		[42]
Nitrogen dioxide	ZnO nano rods	0.36	0.5	400	15	[43]

Fig. 7. Schematic diagram of sensing behaviors: (a) bare In2O3 nanofiber with the depletion layer formed by chemisorbed oxygen species; (b) Au-In2O3 nanofibers with the increased depletion layer due to the oxygen species spilled from Au as well as chemisorbed oxygen species; (c) Au-In2O3 nanofibers with the decreased depletion layer after the exposure on HCHO reducing gases.

Fig. 8. (a) Selective sensing properties of Au-In2O3 nanofibers (15 mL lysine) on the micro-platform heated with controlled powers in the exposure on HCHO, toluene and CO gases with different concentrations and (b) sensing properties to 1 ppm HCHO gases in the 10 mW powered micro-platform at various humidity conditions.

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Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In₂O₃ nanofibers integrated on low power MEMS platform

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