J. Mater. Sci. Technol. ›› 2019, Vol. 35 ›› Issue (10): 2232-2237.DOI: 10.1016/j.jmst.2019.06.005

• Orginal Article • Previous Articles     Next Articles

Gas sensing selectivity of oxygen-regulated SnO2 films with different microstructure and texture

Ruiwu Lia, Yanwen Zhoua, Maolin Suna, Zhen Gonga, Yuanyuan Guoa, Xitao Yina*(), Fayu Wua*(), Wutong Dingb   

  1. a School of Material Science and Metallurgy, University of Science and Technology Liaoning, Anshan, 114051, China
    b State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou, 730050, China
  • Received:2019-05-13 Revised:2019-05-30 Accepted:2019-06-01 Online:2019-10-05 Published:2019-08-28
  • Contact: Yin Xitao,Wu Fayu

Abstract:

The selectivity of gas sensing materials is increasingly important for their applications. The oxygen-regulated SnO2 films with (110) and (101) preferred orientation were obtained through magnetron sputtering, followed by annealing treatment. Their micro-structure, surface morphology and gas response were investigated by advanced structural characterization and property measurement. The results showed that the as-prepared (110)-oriented SnO2 film was oxygen-rich and had more adsorption sites while the as-prepared (101)-oriented SnO2 film was oxygen-poor and more sensitive to de-oxidation. H2 gas sensitivity, response speed, selectivity between H2 and CO of the (110)-orientated SnO2 film was superior to that of the (101)-orientated SnO2 film. After treated at high temperature and high vacuum, the reduction of gas-sensing properties of the annealed (110) SnO2 film was much more than that of the annealed (101) SnO2 film. The lattice oxygen was responsible for the difference in gas-sensing response between (110) and (101)-oriented SnO2 films under oxygen regulation. This work indicated the gas-sensing selectivity of the different crystal planes in SnO2 film, providing a significant reference for design and extension of the related materials.

Key words: Gas sensor, SnO2, Oxygen regulation, Preferred orientation, H2 selectivity