J. Mater. Sci. Technol. ›› 1989, Vol. 5 ›› Issue (2): 96-100.

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An Improvement on Adhesion of Sputtered TiC Coating to Steel Substrate

QI Zhenzhong;YAO Weiguo;WANG Yuqi;LIU Ling;JIA Junhui Institute of Solid State Physics, Academia Sinica, Hefei, China.   

  1. InstituteofSolidStatePhysics,AcademiaSinica,Hefei,China.;InstituteofSolidStatePhysics,AcademiaSinica,Hefei,China.;InstituteofSolidStatePhysics,AcademiaSinica,Hefei,China.;InstituteofSolidStatePhysics,AcademiaSinica,Hefei,China.;InstituteofSolidStatePhysics,AcademiaSinica,Hefei,China.
  • 收稿日期:1989-03-28 修回日期:1989-03-28 出版日期:1989-03-28 发布日期:2009-10-10

An Improvement on Adhesion of Sputtered TiC Coating to Steel Substrate

QI Zhenzhong;YAO Weiguo;WANG Yuqi;LIU Ling;JIA Junhui Institute of Solid State Physics, Academia Sinica, Hefei, China.   

  • Received:1989-03-28 Revised:1989-03-28 Online:1989-03-28 Published:2009-10-10

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摘要： <正> Introducing N_2 during sputtering andpre-oxidation of substrate were investigatedto improve the adhesion of sputtered TiC coatingto steel substrate. The results show thatyeactive gas N_2 increases the adhesion of TiCcoating to steel because of a graded interfaceexisting between coating and substrate. Theinteraction of discharge plasma with the surfaceof substrate was discussed. Pre-oxidation ofsubstrate is effective for improving the adhesiondue to the fomation of FeTi0_3 which appearedas an inteylayer between coating and pre-oxidizedsubstrate.

Abstract: Introducing N_2 during sputtering and pre-oxidation of substrate were investigated to improve the adhesion of sputtered TiC coating to steel substrate. The results show that yeactive gas N_2 increases the adhesion of TiC coating to steel because of a graded interface existing between coating and substrate. The interaction of discharge plasma with the surface of substrate was discussed. Pre-oxidation of substrate is effective for improving the adhesion due to the fomation of FeTi0_3 which appeared as an inteylayer between coating and pre-oxidized substrate.

Key words: Sputtering, adhesion strength, scratch test, interface (graded interface), pre-oxidizing