J. Mater. Sci. Technol. ›› 1995, Vol. 11 ›› Issue (2): 114-118.

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Nondestructive Evaluation of Ferroelectric Multilayer Capacitors Using Electromechanical Resonances

Hongtao SUN; Hongfang WANG; Liangying ZHANG and Xi YAO(Electronic Materials Research Laboratory, Xi'an Jiaotong University, Xi'an, 710049, China)   

  • 收稿日期:1995-03-28 修回日期:1995-03-28 出版日期:1995-03-28 发布日期:2009-10-10

Nondestructive Evaluation of Ferroelectric Multilayer Capacitors Using Electromechanical Resonances

Hongtao SUN; Hongfang WANG; Liangying ZHANG and Xi YAO(Electronic Materials Research Laboratory, Xi'an Jiaotong University, Xi'an, 710049, China)   

  • Received:1995-03-28 Revised:1995-03-28 Online:1995-03-28 Published:2009-10-10

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摘要： 1.IntroductionReliabilityofelectroniccomponentsbecomesmoreandmoreimportantforcomplexelectronicequip-mentsandsystems[1j.Theceramicmultilayercapac-itor(MLC)hasbeenextensivelyusedinelectronicdevicesforitsadvantagesofhighcapacitanceandsmallvo1ume.MLCisacompositestructuremadefromalternatinglayersofmetal(electrode)andce-ramic(dielectricmaterial).ItiscrucialtoMLCpro-ductionthatmetalandceramicmateria....

Abstract: Under the mechanically free and clamped boundary conditions, electromechanical resonances of ceramic multilayer capacitors are calculated using vibration and piezoelectric equations. Multilayer capacitors made of ferroelectric BaTiO3 and Pb(Mg1/3Nb2/3)O3 ceramics have been used to examine the theoretical calculation. Frequency spectra of impedance and phase angle, capacitance and loss tangent of the capacitors under dc bias fields are carefully measured. A sudden change around the resonant frequency is observed in these spectra. A damped resonance indicates a defective capacitor while an undamped resonance is corresponding to defect free.Experimental results suggest that it is possible to use the spectra as a real time nondestructive evaluation method.